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PSS Wafer Pattern Inspection System “APPRAISER”
APPRAISER provides the high speed quality check of PSS pattern distribution,
and provides clear feedback plan to the manufacturing system.
APPRAISER is suitable for Outgoing QA in PSS Sapphire Wafer Maker
and Incoming QA in LED Chip Wafer Maker.
1. Key Features
A) Confirmed high correlation with the yield data of LED chip
B) Achieves Whole and Full Wafer Inspection by High Speed Inspection
C) Achieves Analysis and Visualization of weak process to improve the yield
D) Provides Detailed Analysis Report automatically
to do the analysis and improvement the process
2. One Example of Inspection Result

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